Analysis of Split Proof Mass Pieozoelectric Cantilever based MEMS Energy Harvesting System using Ultra Low Power Rectifier Circuit

Micro Electro Mechanical system (MEMS) based piezoelectric energy harvesting system is demanding technology in powering tiny wireless sensor nodes. Realization of efficient energy harvesting system depends on the performance of the all subsystems i.e piezoelectric generator, rectifier circuit and storage device. Most of the researches target in optimizing the piezoelectric generators by analyzing it with different materials, shapes and dimensions. Moreover output voltage generated from the piezoelectric generator is of few volts which is not sufficient for operating rectifier circuit. In this paper, the ultra low power (ULP) diode based rectifier circuit interface with the piezoelectric generator is analyzed. The DC output voltage harvested by the system at a resonant frequency of 57.1 Hz is 150 mV