Introduction of Highly Reliable Versatile Analog Platform with Embedded NVM for Automotive Applications

This paper demonstrates a highly reliable versatile analog platform with embedded NVM for automotive applications. The platform provides LDMOS up to 60V, 1.5-5V CMOS, bipolar devices, diodes, and other passive devices. Especially, three kinds of LDMOS structures (STI-based, stepped oxide-based, and LOCOS-based) can be selected from the viewpoint of performance, reliability, rated voltage, and cost. Although the stepped oxide-based and the LOCOS-based LDMOS have lower on-resistance and better reliability characteristics than the STI-based one, additional process steps are needed. Moreover, highly reliable embedded NVM (Floadia LEE flash G1) with considering the effect of the negative carrier injection from switching LDMOS was integrated. The Vth distribution of 64 KB array showed no change even after 100k P/E cycles under 150°C condition. In the retention test, which applied 250°C/3hours baking after 100k P/E cycles, no Vth distribution change was observed and AEC-Q100/Grade-0 was achieved.