Design and Analysis of MEMS Thermopile Sensor with Multiple Absorption Regions

With the maturity of MEMS technology, MEMS thermopile sensors are widely used in the market. In this paper, a thermopile structure with parallel arrangement of thermocouple strips and multiple infrared absorption zones is designed, and the thermal model of the structure is established, the relationship between the output performance and the parameters of each part is obtained, and the structure size is optimized. On this basis, thermoelectric simulation and thermal path analysis of the sensor are carried out, and the optimal results are obtained: the responsivity is 423.3V/W, the detectivity is 3.49×10
⁸
cmHz
^1/2
/W, the noise equivalent power is 1.8×10
^-10
W/(Hz)
^1/2
, and the response time is 20.9 ms. Compared with the reported thermopile sensor, the output performance is greatly improved. At the end of this paper, the processing process is also introduced.