Research on Wafer Temperature Monitoring in IC Process

The real-time and accurate temperature monitoring is very important for strictly controlling the wafer temperature in the process of integrated circuits (IC) manufacturing, which is conductive to the fabricating of high-performance chips. In this report, the current research of various methods of wafer temperature monitoring in IC process has been summarized. A wafer integrating main control circuit, batteries and multiple temperature sensors is constructed for the in-situ temperature monitoring. Combined with the reconstruction algorithm, the two-dimensional temperature field of the integrated wafer is reconstructed.