A K-band Resonant Impedance Tuner with a Solid-State Hybrid Tuning

This paper presents the first K-band resonant impedance tuner based on a solid-state hybrid tuning system. The tuner employs two coupled high-inductance resonators controlled by a hybrid combination of PIN diodes and varactor diodes. The high-inductance resonator design is key to minimizing the effect of the tuning elements on the quality factor of the resonators. Employing solid-state tuning elements is critical for maintaining fast tuning speed. The presented design is experimentally validated with a proof-of-concept demonstration in the 23-25 GHz range with 576 impedance points per frequency and a tuning time of 100 ns. To the authors best knowledge, this is the first high-Q stand-alone solid-state mmWave impedance tuner.