Laser-Assisted and Additively Manufactured Multilayer Metal-Insulator-Metal Capacitors

This paper presents a new fabrication technique for a new type of multi-layered metal insulator metal (MIM) capacitors using a high-k dielectric paste. Micro-dispensing is used to realize a 3D printed five-layer MIM capacitor on a Kapton tape. A femtosecond laser is applied for via definition and connections of alternating conductive layers. Dupont CB028 and Creative Materials 128-49 are used to form conductive and dielectric layers, respectively. Measured and simulated data show an effective capacitance of 36 pF, self-resonance frequency of 2.9 GHz, and Q factor of 12 for a 0.85 mm2 five-layer MIM capacitor.