Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

This is a panel paper which discusses the use of Artificial Intelligence (AI) techniques to address production level problems in semiconductor manufacturing. We have gathered a group of expert semiconductor researchers and practitioners from around the world who have applied AI techniques to semiconductor problems and the paper provides their answers to an initial set of questions. These serve to provide a description of the AI work that has taken place already and to make suggestions for future directions in this arena.