Towards A Generic Semiconductor Manufacturing Simulation Model

Simulation is one of the most used approaches to analyze semiconductor manufacturing systems. However, most simulation models are designed for single-use applications and study a limited set of problems that are not reusable afterwards. Recently, in order to overcome this problem, the idea to develop a generic wafer fab simulation model has emerged. Nonetheless, few papers address the development of a generic wafer fab simulation. This paper proposes a generic, data-driven simulation model to evaluate and analyze a wide range of problems arising in modern semiconductor manufacturing systems. We discuss the issues related to the genericity of such a simulation model and the data and semantic integration issues faced by users.