Preparation of MgF2, SiO2 and TiO2 Optical Films

In order to improve the light reception on the surface of optical elements, the electron-beam evaporation method was used to prepare the transparency-enhancing films. The simulated one-layer, three-layer and six-layer transmission-enhancing film systems of MgF2, SiO2 and TiO2 were simulated using Macleod optical thin film design software, and the six-layer transmission-enhancing films of MgF2 and TiO2 superimposed were optimally designed using the simplex method. The films were prepared with different parameters using a ZZS800-3/G chamber vacuum coater. The results show that the single-layer films of MgF2 have the highest transmittance on glass substrates, the single-layer and three-layer films have good transmittance in specific wavelength bands, the six-layer films have high transmittance in the visible wavelength band from 400 to 700 nm, and the best transmittance is achieved when the incident light angle is varied from 0 to 60°. Among the different preparation processes, the film with the smallest electron beam flow and the slowest evaporation rate has the best optical performance, and the average transmittance of the six-layer film is 95.0%, with the maximum value of 95.3% at 510 nm and 700 nm.