A T-Shaped Mems Differential Resonant Accelerometer with Module-Base Demonstration of >134 Db Dynamic Range and <1 Mdeg Absolute Tilt Angle Precision

This paper presents a MEMS differential resonant accelerometer (DRA) in a compact module (5 cm × 5 cm × 1 cvm), The module integrates an analog board with a vacuum-sealed MEMS DRA device and a digital board with a microcontroller unit. By adding T-shaped electrodes to two resonant beams, the capacitance sensitivity was improved and a high bias instability (BI) of 7.9 µG was achieved. We also demonstrated a high dynamic range of 134 dB and linearity by applying high-G acceleration (0 to 40 G) by centrifugal force using a rotating table. Furthermore, we demonstrated the measurement of absolute tilt angle (tilt angle relative to the direction of gravity) of the rotation axis of the rotary table, with measurement precision of 0.34 mdeg.