A LiNbO3-Based Subharmonic Tag For Passive And Far-Field Identification

We report the performance of the first prototype of a new class of Ultra-High-Frequency (UHF) MEMS-based passive identification subharmonic tags (SubHTs) for far-field sensing. This device leverages the combined dynamics of high-Q X-cut Lithium Niobate (LiNbO
3
) acoustic MEMS resonators and those of solid-state components to enable a long-range passive identification functionality without requiring any active components or any ad-hoc memory devices. Through the demonstration of the reported prototype we have enabled the adoption of SubHTs even to large deployments of wireless sensor nodes (WSNs), each of which able to distinguish data coming from a plethora of other devices.