Via-Less Two-Axis Electromagnetic Scanner Using An Asymmetric Frame On A One-Axis Lateral Magnetic Field

We developed a two-axis resonant electromagnetic scanner having an asymmetric frame that generates two-axis torques from a one-axis lateral external magnetic field. Two driving forces are generated by two independent electromagnetic actuators placed at both sides of the asymmetric frame, and the frame converts the one-directional forces into two-axis torques. As the two driving actuators are independent, driving current paths are isolated, and the proposed device also meets the other criteria: via-less single-metal-layer fabrication and no current path on the mirror part. We demonstrated biaxial scanning with the proposed structure having a 4-mm mirror. The optical scanning angle was 16.1° for the 1.308 kHz X-axis scan and 4.84° for the 2.568 kHz Y-axis scan when the currents of 300 mA were applied to the X-axis and Y-axis driving actuators independently.