A Mems Based Electrochemical Angular Accelerometer with a High-Integrated Sensing Unit

This paper proposed a MEMS based electrochemical angular accelerometer with a high-integrated sensing unit, which adopted a two-layer bonding structure of silicon-silicon and featured simplified assembly processes. The design, fabrication and characterization of the micro sensor were conducted. Compared with the previously reported counterparts, a significant improvement in the sensitivity (679 V/(rad/s
²
) vs. 100 V/(rad/s
²
)) and noise level (−145 dB vs. −105 dB) was achieved, which indicates the potential of monitoring rotation motion in seismology.