Detection of Single Molecular DNA Charge Through TFT-Integrated Nanopore Biosensor

We developed nanopore devices that monolithically integrate thin-film transistors along the inner walls of the nanopores, with the TFT channel lengths and nanopore diameters both reaching ~10 nm. The device is self-aligned and the fabrication process is compatible with the conventional TFT process and TEM drilling process. We demonstrated sensing of the single molecular DNA charge through such devices. Negatively charged dsDNA translocation experiments were conducted. Correlated ionic and TFT signals were identified from the two-channel recording. The charge-based field effect is attributed to the sensing process and is consistent with the device characteristics.