Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.