Introduction
The spread of MEMS in the consumer market is rapidly increasing thanks to their small dimensions, high performances and low costs. This is posing an important challenge to MEMS designers that have to simultaneously improve the effectiveness of actual devices and find innovative working principles. In this framework, an a-priori and fast simulation tool, able to simulate the complex multiphysics and often nonlinear dynamic response of MEMS devices, is desirable. Such a tool would dramatically improve the design process, the experimental data post-processing, and the exploitation of innovative working principles based for example on nonlinear phenomena [1]–[3].