Active Virtual Mass Micro-Vibration Isolation Control Method based on Two-Parameter Acceleration Feedback

External interference is an important factor affecting the accuracy and stability of precision equipment. An active micro-vibration isolation control method is proposed and used in active vibration control to suppress external interference in this paper. This method is based on two-parameter acceleration feedback, which splits the acceleration feedback gain into two parameters, one on the front path and one on the feedback path. Compared with the traditional acceleration feedback, the proposed method not only increases the virtual mass of the system to reduce the natural frequency, but also suppresses the excessive motor output in the vibration isolation system simultaneously. Simulation results proved the effectiveness of the proposed two-parameter acceleration feedback control method in preventing excessive motor output, and experimental results confirm its capacity to reduce the natural frequency of the system.