Study on electrical characteristics of planar DBD Structure excited by high frequency AC power supply

Aiming at the structural defects of coaxial DBD and surface DBD, a planar DBD structure suitable for large-area plasma generation is designed in this paper, and the effects of voltage amplitude, gas velocity and oxygen content on the electrical characteristics of planar DBD structure driven by high-frequency AC power supply are studied. The increase of voltage amplitude will increase the discharge current of planar DBD structure The discharge power increases. The increase of gas flow rate will also increase the discharge current and discharge power of DBD structure, but the effect of gas flow rate tends to saturation when it reaches a certain value. The electronegativity of oxygen will weaken the electron collision process, inhibit the discharge, weaken the intensity of discharge, reduce the discharge power and reduce the discharge current.