Abstract:
We demonstrate acousto-optic modulation (VπL ~3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small...Show MoreMetadata
Abstract:
We demonstrate acousto-optic modulation (VπL ~3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.
Date of Conference: 07-10 December 2021
Date Added to IEEE Xplore: 18 January 2022
ISBN Information: