Modified Loss Mechanism of Mason Model for Bulk Acoustic Wave Resonators

The frequency-adaptive loss mechanism of Mason model is established to improve the simulation accuracy of bulk acoustic wave (BAW) resonators. By introducing intrinsic loss factors of piezoelectric material, values of loss components in Mason model are modified to be frequency-adaptive, which avoids repetitive extractions of loss parameters for different working frequencies of BAW devices. To verify the accuracy of the modified loss mechanism, a BAW resonator is simulated by the Mason model and the two-dimensional (2D) model based on finite element method (FEM). Without considering the transverse effects of BAW resonator, simulation results of the two models fit well with each other in the full-frequency range.