Frequency Domain-Based Integral Resonant Control Design for a MEMS Nanopositioner

In this paper, a multivariable integral resonant controller is designed based on the measured frequency response of a 2-DOF MEMS nanopositioner with collocated sensors and actuators. The objective is to augment damping of the fundamental resonant mode of the nanopositioner by minimizing a cost function in an H2 sense. The design procedure is cast as convex optimization problem using Taylor expansion around an initial controller. Considering the plant and controller as negative imaginary (NI) and strictly NI systems, the NI stability constraint is imposed to the optimization algorithm. The performance of data-driven IRC is evaluated in closed-loop experiments with the MEMS nanopositioner.