Improvement in measurement accuracy of on-wafer measurements from millimeter-wave to Terahertz frequencies

Device measurement techniques in the millimeterwave (mmW) and THz frequencies are necessary for realizing novel communication technologies such as beyond-5G/6G technologies. Degraded measurement reproducibility is one of the serious problems in those frequencies band. Precision measurement technique, named RF signal detection (RSD) technique, is developed to address the problem. This paper reviews the RSD technique, and reports recent improvements, such as demonstration in the frequencies up to 500 GHz, and with a multi-signal probe.