RF Evaluation of Steep Subthreshold Slope “PN-Body Tied SOI-FET”

RF evaluation data of the steep subthreshold slope "PN-Body Tied (PNBT) SOI-FET" was obtained, for the first time. The test devices which have GSG pad layout were prepared and S-parameters were measured with Vector network analyzer. The calculated Fmax, Ft were compared with the conventional SOI-FET and PNBT SOI-FET, focusing on the small gate overdrive voltage. Enhancement of Fmax, Ft was confirmed by PNBT SOI-FET. It is good news because PNBT SOI-FET has a speed issue due to having the inherent thyristor structure.