A configurable single axis Si-MEMS Gyro

In this paper, we present a TRL 7 single axis Si-MEMS gyro ($\mu$CORS). A modular design with a digital section with high computing power that leads to a platform concept, which is highly configurable to allow for different future development directions as well as for different applications. The configuration options comprise control loop settings to enable continuous operation even under harsh environmental conditions, such as shock levels of up to $800\mathrm{g}/ 0.5\mathrm{m}\mathrm{s}$. On the other side, the $\mu$CORS can be configured such that a performance as reported in [1] and beyond can be obtained, which enables navigation applications. In this paper, measurement results of the $\mu$CORS hardware with different configurations will be presented and the $\mu$CORS will be characterized. Specifically, results of high-g shock test will be discussed. Finally, an outlook of the various development directions in the field of MEMS gyroscopes at LITEF is given and how the $\mu$CORS platform will be utilized for that.