The Monitor and Management of Sulfide Contamination for Probing FAB clean room

The air-sampling and wafer-sampling analysis procedure of sulfide contamination for circuit probing fab environment was reported due to increasing sensitivity of die level device to contamination. In this investigation, there are three methods used to monitor sulfide-contained species concentration such as the Ag-Si specimen discolored experiment, total sulfur UV-fluorescence analyzer and Ion Chromatography. However, the Ag-Si specimen discolored experiment need OM, SEM and EDS inspection to qualitatively analysis the situation of sulfide contamination. Additionally, the installation of chemical filter was also introduced into the daily facility management system of clean room. All these monitoring procedures and facility engineering approaches are valuable way to prevent the sulfide impact on clean room environment.