Newly Developed Heat Source Combined with Short-Duration Flash Lamp Annealing (FLA) Featuring a Low Thermal Budget and Low Environmental Load

We present a newly developed low thermal budget heat unit with increased ramp up and cooling rates. Moreover, this unit provides an energy saving of more than 50% compared to a conventional unit. With this tool, super activation with minimal diffusion is obtained in boron doped Si. These results indicate that our technique can be applied to advanced node devices which require high activation with green manufacturing technology.