10 MHz Length-Extension Mode Quartz MEMS Resonator For Frequency and Time Applications

In this paper, we present recent advances on a quartz Microelectromechanical system (MEMS) resonator. This resonator is well suited to replace standard macroscopic crystal quartz resonators in crystal oscillators combining high performances, low costs thanks to collective processes and low power consumption in emerging applications such as Internet of Things, embedded systems or the cellular network development (5G).