Emission Behavior of Planar Nano-Vacuum Field Emitters

In this work, we analyze the behavior of planar nano-vacuum channel emitters. We developed a fabrication process to reliably pattern metallic (Au) and refractory (TiN) nanoemitters with sub-10nm features. We then investigated the field emission properties of the devices highlighting the transition between Schottky to Fowler-Nordheim field emission, and finally to the Child-Langmuir saturation regime.