Stabilized control of electromagnetic micro-mirror

In this paper, the stabilized control of electromagnetic scanning micro-mirror (EMSM) which has underdamped and hysteresis feature leading to undesirable oscillation and positioning error is investigated. In order to propose a model-based stabilized control scheme, a Hammerstein model with hysteresis is established for EMSM system. Then the pseudo linearization method is used to analyze the EMSM. And a new sufficient stabilitized condition is obtained based on the Lyapunov method. Afterward, simulation results verify the theoretical result.