Nanostructured surface's cytotoxicity study of silicon wafers to mammalian cells

The cytotoxicity of the silicon wafers' surface was studied on immortalized SC1 mouse fibroblasts. The standard for microelectronics methods of surface treatment of wafers was used: chemical treatment and etching, thermal oxidation, anodic etching of silicon, deposition of a graphene film. The cytotoxicity of methods used for silicon wafers surface's nanostructuring has been determined.