Design and implementation of high sensitivity bullet shaped cilia vector turbulence sensor

In this paper, a bullet shaped cilia turbulence sensor based on piezoresistive principle is proposed to solve the problems of low sensitivity, low resolution, high cost and difficult to realize multidirectional synchronous observation of the existing shear flow sensor. the core component of the sensor adopts cilia-cross beam structure. Because of the orthogonal relationship of the cross beam, the turbulence signal received by the cilia can be converted into X and Y signal output. The vector test results show that the sensor can realize the observation of two-dimensional turbulence signal. Secondly, the sensor chip is fabricated by MEMS piezoresistive process, which can realize the miniaturization of the product and ensure the consistency of structure and low cost. Finally, the sensor adopts “warhead” cilia, which has the same streamlined structure as the existing piezoelectric ceramic probe, and has smaller volume and higher resolution. At the same time, based on the comparative calibration method, it is verified that the sensitivity of the sensor is 94 times higher than that of the commercial PNS shear flow sensor, which can reach
$4.86{}^{\ast}10-4\text{Vms}2/\text{kg}$
. Therefore, the successful application of the bullet shaped cilia turbulence sensor has laid the foundation of sensing technology for the realization of ocean state transparency, process transparency and change transparency.