Development of Luminescent Thin Films Based on Superlattice Structures of Al2O3 and ZnO by Atomic Layer Deposition

Thin films using ZnO and Al
2
O
3
were fabricated by ALD. The crystallinity, surface roughness, spatial uniformity of the emission intensity and luminescence intensity were evaluated. As a result, the crystallinity, surface roughness, and spatial uniformity of the emission intensity improved as the Al
2
O
3
layer was increased, but luminescence intensity decreased.