Theoretical and experimental study of propagating Lamb wave mode caused by the SAW in glass plate/thin water layer/128YX-LiNbO3 structure

A disposable digital microfluidic system is realized using sensor plate/thin water layer/piezoelectric substrate. It is important to clarify the Lamb wave mode, which propagates in the sensor plate. In this paper, the phase velocity of the Lamb wave was experimentally estimated and compared with the Rayleigh-Lamb equation. Also, the acoustic streaming velocity was experimentally obtained. The results indicate that the high phase velocity is realized by decreasing plate thickness and increasing the operating frequency.