Micromachined High Frequency PMN-PT 1–3 Composite Transducer via Cold Ablation Process

A 50 MHz PMN-PT 1–3 composite was fabricated using the cold ablation technique with a picosecond laser. According to the measurements, the average width of the kerf is
$4\ \mu\mathrm{m}$
, which is smaller than half of dicing method. The thickness of the composite is
$35.2\ \mu\mathrm{m}$
, the volume fraction is about 70.8% and its coupling coefficient is 0.73. A micro ultrasonic transducer was subsequently made using the fabricated 1–3 piezocomposite. The experimental results show that the transducer has a center frequency of 52 MHz with a bandwidth of 73%. Our study indicated that it is feasible to develop high frequency PMN-PT 1–3 composites and transducers by cold ablation process.