Realization of Fabrication-Tolerant Si3N4-Si Mode Transformers

A III-V/Si/Si
3
N
4
structure critical in realizing high-performance lasers can be fabricated using microtransfer printing. This approach poses stringent requirements on the
$\text{Si}_{3}\mathrm{N}_{4}-\text{Si}$
couplers. Accordingly, we realized
$174\ \mu \mathrm{m}$
long, fabrication-tolerant Si tapers with simulated losses below 0.8 dB up to 750 nm misalignment.