Acousto-optic modulation in lithium niobate on silicon nitride heterogeneous waveguides

This work demonstrates the first acousto-optic modulators in heterogeneous waveguides of thin film LiNbO
3
on Si
3
N
4
. Optical modes confined in LiNbO
3
, SiO
2
and Si
3
N
4
are modulated by acoustic waves launched on the surface of LiNbO
3
and electrically detected by cavity detuning from an optical resonance.