Deterministic Creation of Quantum Emitters in Hexagonal Boron Nitride on Non-patterned Substrates

We propose and demonstrate a novel method to create quantum emitters in hexagonal boron nitride (hBN) with an atomic force microscope. This technique applies to hBN flakes on flat (non-patterned) substrates that are compatible with integrated quantum devices. A single-photon-emitter yield of 30% is achieved.