Simultaneous quantification of atomic O and molecular O3 in non-thermal O2-mixed plasmas

Atomic oxygen is an active species playing an important role in plasma involved processes. However, quantification of atomic O in O 2 -mixed plasmas by two-photon absorption laser-induced fluorescence (TALIF) technology often suffers the disturbance of O 3 through photo-fragmentation by the same laser. In this work, a novel conception benefiting from the photo-fragmentation effect of O 3 , is proposed for calibrating the TALIF signal of atomic oxygen in studied media. 1 Based on the proposed full photo-fragmentation TALIF principle, the O 3 interference is able to be separated from atomic O originated from studied media, and the concentrations of O and O 3 are able to be determined simultaneously if their populations are correlated with each other through kinetic chemical reactions, for instance in repetitive pulsed O 2 -mixed discharges.