Research on Plasma Electron Density Based on Emission Spectroscopy Calibrated by Probe

Electron density is one of the important parameters of inductively coupled plasma. It is of great significance to study the distribution of electron density in inductively coupled plasma. It is difficult to measure the electron density and its distribution at any position of the cavity only by using emission spectroscopy or probe method. To solve this problem, the electron density of inductively coupled argon plasma is diagnosed by using probe calibrated emission spectroscopy. The feasibility of the proposed method was verified by studying the electron density distribution in the axial direction of the cavity. The electron density and its distribution can be diagnosed by using probe calibrated emission spectroscopy for plasma with little change in electron temperature.