Influence of Technological Features of Formation of Humidity-sensitive Thick-film Structures on Their Functionality

Humidity-sensitive thick-film structures based on MgAl
2
O
4
ceramics for sensor electronics have been prepared. Two methods of forming contact areas are demonstrated: using Ag or Ag-Ru paste and conductive thermistor ceramic thick films. It is established that the obtained thick-film structures are characterized by sensitivity at the maximum range of relative humidity. It is shown that thick films formed on Ag-Ru contacts lose their sensitivity after natural physical aging due to degradation of the contact area. Functionality can be restored after re-formation of contacts. The change in resistance in thick films with applied contacts in the form of a thermistor film is one order of magnitude.