ESD Risk Assessment with Discharge Electrode and Antenna Measurement

An improved methodology for ESD risk assessment in production lines is described where critical discharges of semiconductor products are localized by the use of antennas. The shape and amplitude of the sensed antenna signal in the running process are correlated to manually provoked ESD events by specially designed discharge electrodes. The discharge current and its corresponding antenna signal is compared for different tools and antennas to demonstrate the dynamic range and sensitivity of the methodology.