Analysis of factors affecting the outgassing rate of MEMS vacuum packaging materials

The finite element Comsol Multiphysics software was used to analyze the thermal desorption on the surface of the material in vacuum packaging, and the destruction of the vacuum. In this study, three influencing factors, the concentration of initial adsorbed molecules on the surface, temperature and surface roughness, are selected to study the vacuum degradation in vacuum packaging. The orthogonal test analysis of three levels and three factors shows that the initial value of the surface adsorption of the packaging material, temperature, and surface roughness affect the outgassing performance of the package as follows: the value of the initial adsorption> surface roughness> temperature.