Spectrum analysis and application of XY platform servo system of the high-precision packaging equipment

The servo system of XY platform of high-precision packaging equipment is characterized by high requirement for motion performance, complex coupling and different load of X motor and Y motor, which makes it difficult to guarantee the mechanical installation quality of XY platform and improve the motion performance of servo system of XY platform of high-precision packaging equipment. The frequency domain characteristics directly reflect the response and inherent characteristics of the system. Obtaining the frequency spectrum of the XY platform servo system plays an important role in guaranteeing and improving the motion performance of the XY platform. In this paper, the sine frequency sweep method and PRBS signal are used as the excitation signal to obtain the frequency spectrum of the servo system of the XY platform. By inputting a sinusoidal excitation signal or PRBS excitation signal to the system, and processing the input signal and output signal of the system in the time domain, the frequency domain information of the system can be obtained. The two kinds of excitation signals have their advantages and disadvantages. Analyzing the system's frequency spectrum can be used to verify the reliability and consistency of the XY platform and improve the platform's motion performance.