Fabrication, Measurement and Imaging Demonstration of Si-based BIB Terahertz array detector

Si-based blocked-impurity-band (BIB) terahertz array detector with response frequency 6THz has been realized. Measurement system and imaging system are built to characterize the comprehensive performance and imaging capabilities of the BIB detector. Noise equivalent power (NEP) of Si-based BIB array detector is measured to characterize its detection capability of weak signal. Imaging system based on Si-based BIB array detector is built and high-resolution imaging is realized.