Dual-mode interference microfiber vibration sensor based on rectangular beam with through hole

A reflected microfiber vibration sensor is proposed. The axial strain and vibration characteristics of the proposed sensor are experimentally studied. The results show that the axial strain sensitivity is −3.65pm/µε, the acceleration sensitivity is 0.15214V/g at 35Hz, and the frequency detection range is 30 – 3500Hz. The compact structure, high sensitivity and simple manufacturing method make the microfiber vibration sensor great prospect in mechanical and acoustic vibration field.