Development and Test of a UPS for Voltage Sag Immunity in IC Manufacturing

This work proposes a UPS (uninterrupted power supply) system for voltage sag immunity in IC manufacturing based on lithium iron phosphate battery energy storage technology and designs a lithium iron phosphate battery energy storage system and its battery management system. Oriented to the requirements of semiconductor manufacturing which includes high-voltage, high-current, high-power and high-rate performance, this work uses lithium iron phosphate battery modules as energy storage modules and establishes a hierarchical centralized battery management system to achieve “one-to-many” management mode of each single battery. Combined with the flexible sampling process of the battery management system, the system can accurately capture the abnormalities of the power grid such as devices' voltage fluctuations and sags and provides an optimized power configuration plan. Based on high-precision battery managing algorithms, the system realizes functions of temperature protection, over-current protection, voltage protection and battery balancing. The performance tests of the discharge module, communication, current acquisition, the BCU and the UPS power system are performed for the UPS system. The test results show that the various indicators of the system meet the design requirements, and the system can solve the problems of voltage sag and power supply interruption, and can provide uninterrupted, stable and reliable AC power for precision IC manufacturing.