Terahertz Monolithic Integrated Cavity Filter Based on SiC Substrate

In this paper, a terahertz integrated cavity band-pass filter (ICF) based on silicon carbide (SiC) has been proposed. The cascade triplet (CT) topology and over-moded cavity has been utilized to implement out-of-band suppression. Measurement showed that at the center frequency of 185GHz, insertion loss of the ICF is only 1.55dB, with a relative bandwidth of 9.7%. Two transmission zeros (TZs) has been produced, achieving the suppression of the upper side-band of higher than 40dB. Compared with a traditional cavity filter, the ICF is only one-thousandth of the volume with providing similar electric performance and better integration.