High-Efficiency On-Chip Measurement System for Millimeter Wave/Terahertz High-Resolution Phase Shifter

The frequency response of phase shifter could be measured with the help of the vector network analyzer (VNA). But such a method suffers low efficiency when we need to measure millimeter wave (mmWave)/terahertz high-resolution phase shifter, because the operation states of the phase shifter would increase exponentially as the resolution increases, implying longer measurement time. To confront the challenge, in this paper, a high-efficiency on-chip measurement system for the mm Wave/terahertz high-resolution phase shifter is proposed. Based on the VNA and the probe station, we develop a multifunction platform to automatically change the operation state of the under-test phase shifter, and construct the coding to render the PC to control the measurement process. With the utilization of the proposed measurement system, we could finish the measurement of mm Wave/terahertz high-resolution phase shifter in a significantly shorter time.