Integration of Magnetostrictive Microsensor With Hall Element for Microstructure Resonant Detection

Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.