Reconfigurable Acoustofluidic Manipulation of Particles in Ring-Like Rich Patterns Enabled on a Bulk Micromachined Silicon Chip

Acoustofluidic platforms typically enable only rectangular matrix-like of particle patterns in a closed microchamber actuated by a surface acoustic wave (SAW) device. More complex and unique patterns require a sophisticated and dedicated SAW transducer. As a first, we demonstrate the generation of ring-shape particle patterns on-chip actuated by a simple generic SAW transducer. The ability to reshape unique acoustic field on-chip is realized by using a bulk micromachined microelectromechanical systems (MEMS) chip. We also show for the first time the creation of a two-dimensional (2D) pattern with just a one-dimensional (1D) standing SAW (SSAW). These results pave the way toward truly plug-and-play acoustofluidics, where unique patterns are defined by a diverse range of interchangeable chips on a standard SAW transducer.